JPH0413658U - - Google Patents

Info

Publication number
JPH0413658U
JPH0413658U JP5502890U JP5502890U JPH0413658U JP H0413658 U JPH0413658 U JP H0413658U JP 5502890 U JP5502890 U JP 5502890U JP 5502890 U JP5502890 U JP 5502890U JP H0413658 U JPH0413658 U JP H0413658U
Authority
JP
Japan
Prior art keywords
sealing member
cooling gas
processing apparatus
gas passage
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5502890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5502890U priority Critical patent/JPH0413658U/ja
Publication of JPH0413658U publication Critical patent/JPH0413658U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP5502890U 1990-05-25 1990-05-25 Pending JPH0413658U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5502890U JPH0413658U (en]) 1990-05-25 1990-05-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5502890U JPH0413658U (en]) 1990-05-25 1990-05-25

Publications (1)

Publication Number Publication Date
JPH0413658U true JPH0413658U (en]) 1992-02-04

Family

ID=31577617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5502890U Pending JPH0413658U (en]) 1990-05-25 1990-05-25

Country Status (1)

Country Link
JP (1) JPH0413658U (en])

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